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Nano and micro electomechanical systems: fundamentals of nano and microengineering
Main Author: | |
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Format: | Printed Book |
Language: | English |
Published: |
Boca Raton
CRC Press
2005
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Edition: | 2nd ed. |
Subjects: |
UL
Call Number: |
621.382:620.3 LYS |
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Copy | Live Status Unavailable |